 RSD2013 version 3 release (December 2018)	
==========================================

IMPORTANT
==========

Please read the DISCLAIMER OF WARRANTIES AND LIMITATION OF LIABILITY in the accompanying file 'Disclaimer.txt'

No guarantee of results is given.
You use this software on your own risk, 
but you are more then welcome to discuss its results with the author.
For remarks, problems, errors, suggestions, discussions,... 
you are kindly invited to contact the author by e-mail koen.strijckmans@ugent.be

When using RSD2013 in publications or other public presentations, please acknowledge the author by using this reference
K Strijckmans and D Depla, J. Phys. D: Appl. Phys. (2014) 47 235302

 Quick start
=============

Two executables are provided:

 - RSD2013_GUI.exe
---------------------
This executable will start the Graphical User Interface (GUI) of RSD.

It enables the user to create (multiple) input files for the RSD simulation module, and let them run.
This GUI creates minimal two and maximal four input files. The file name of the main input file is used as prefix for the three others.
Moving across buttons and texts in the GUI should pop-up little tool tips (i.e. help info).

The GUI restricts the parameter range which can be given as input. These restrictions can be overruled by direct editing of the generated input files.

Note : The user can use the . to specify relative file locations from the program folder.
e.g. .\INPUT\EXAMPLES

 - RSD2013.exe
------------------
This executable is the effective RSD simulation module. It can also be directly used on the command line provided with the main input file.

This executable is called from within the GUI if a simulation is ordered to run.
Well suited input files (created by the GUI or manually) should be provided.
As argument on the command line the user gives only the main input file name (i.e. shortest name):

	e.g. RSD2013.exe "C:\some directory\my_input_file.in"

 Example simulations
=====================

The INPUT folder contains an EXAMPLES folder with the simulation configurations of the example system discussed in the article:
K. Strijckmans, D. Depla, A time dependent model for reactive sputter deposition, submitted for publication to J. Phys. D Appl. Phys (2014).
While the paper considers the time solution, the input files for the steady state simulations are also included in the EXAMPLES folder under the folder STEADY.

These input files can be opened in the GUI for editing or running the simulations.
The folders 'target', 'substrate' and 'step' contain additional input files for the example simulation configurations,
and illustrate how these files should be arranged.

 Simulation output
===================

The two output formats are :

 - ASCII text files
----------------------
All output can be generated in the ASCII format.
The spatial resolved output is arranged as:
 
 -- 2D profile (=surface profile)
----------------------------------
The output is printed for every steady state point as a matrix with dimension R x C
where
C : number of columns (y or theta dimension of the surface)
R : number of rows (x or r dimension of the surface)
<x,y> : numerical value at row x and column y

The number of R x C matrices correspond to the the number of steady state points S.
The first row of the file numbers the columns, while the numbering of the row is repeated for every matrix as the first column.

A schematic representation:

C	0		1		...	C-1			
0	<0,0>		<0,1>		...	<0,C-1>			= matrix 1
1	<1,0>		<1,1>		...	<1,C-1>
.	.		.		...	.
.	.		.		...	.
.	.		.		...	.
R-1	<R-1,0>		<R-1,1>		...	<R-1,C-1>		----------
0	<0,0>		<0,1>		...	<0,C-1>			= matrix 2
1	<1,0>		<1,1>		...	<1,C-1>
.	.		.		...	.
.	.		.		...	.
.	.		.		...	.
R-1	<R-1,0>		<R-1,1>		...	<R-1,C-1>		----------

.						.
.						.
.						.
									----------	
0	<0,0>		<0,1>		...	<0,C-1>			= matrix S
1	<1,0>		<1,1>		...	<1,C-1>
.	.		.		...	.
.	.		.		...	.
.	.		.		...	.
R-1	<R-1,0>		<R-1,1>		...	<R-1,C-1>		-----------
		

 -- 3D profile (=subsurface profile)
------------------------------------
The output is printed for every steady state point as a matrix with dimension (R*N) x C
where
R*N : number of rows
N : number of cell in y or theta dimension of the surface 
R : number of cell in x or r dimension of the surface
C : number of cell in depth dimension of the subsurface
<x,z> : numerical value at row x and column z
<z> : numerical value of depth coordinate of cell z in the subsurface

The number of (R*N) x C matrices correspond to the the number of steady state points S.
The first row of the file gives the depth coordinate [units : cm].
The first column numbers the rows and is repeated for every matrix.
Every N rows of every matrix correspond to the y or theta dimension of an cell in the x or r dimension.

A schematic representation:

C		<0>		<1>		...	<C-1>			
0		<0,0>		<0,1>		...	<0,C-1>			= matrix 1
1		<1,0>		<1,1>		...	<1,C-1>
.		.		.		...	.
.		.		.		...	.
.		.		.		...	.
N-1		<N-1,0>		<N-1,1>		...	<N-1,C-1>
N		<N,0>		<N,1>		...	<N,C-1>
.		.		.		...	.
.		.		.		...	.
.		.		.		...	.
2*N-1		<2*N-1,0>	<2*N-1,1>	...	<2*N-1,C-1>

.							.
.							.
.							.

(R-1)*N		<R-1)*N,0>	<R-1)*N,1>	...	<(R-1)*N,C-1>
.		.		.		...	.
.		.		.		...	.
.		.		.		...	.
R*N-1		<R*N-1,0>	<R*N-1,1>	...	<R*N-1,C-1>		------------


.
.
.

										------------
0		<0,0>		<0,1>		...	<0,C-1>			= matrix S
1		<1,0>		<1,1>		...	<1,C-1>
.		.		.		...	.
.		.		.		...	.
.		.		.		...	.
N-1		<N-1,0>		<N-1,1>		...	<N-1,C-1>
N		<N,0>		<N,1>		...	<N,C-1>
.		.		.		...	.
.		.		.		...	.
.		.		.		...	.
2*N-1		<2*N-1,0>	<2*N-1,1>	...	<2*N-1,C-1>

.							.
.							.
.							.

(R-1)*N		<R-1)*N,0>	<R-1)*N,1>	...	<(R-1)*N,C-1>
.		.		.		...	.
.		.		.		...	.
.		.		.		...	.
R*N-1		<R*N-1,0>	<R*N-1,1>	...	<R*N-1,C-1>
R*N-1		<R*N-1,0>	<R*N-1,1>	...	<R*N-1,C-1>		------------


 - Binary data files
----------------------
The data is stored in a more compact way.
Only spatial resolved output can be generated in the binary format.
The layout of the data is the same as in the ASCII format but every numerical value is represented by a 32-bit binary float.
This binary format corresponds to the binary format recognized by GNUplot.


Output nomenclature
=====================

<prefix> :				The prefix for the output files specified in the main input file.
<number of substrate> :			The number of the substrate as listed in file with the SIMTRA deposition profiles.

 - General
----------
<prefix>_summary.out :			Summary of the simulation run which is dynamicly updated during run.
<prefix>_hyst_steady.out :		Averaged or total results at every steady state point.
<prefix>_hyst_time :			Averaged or total results at every 256 time steps.

 - Target
----------
<prefix>_target_surf_area :		The surface areas of the target cells [cm^2].
<prefix>_target_surf_current :		The ion current of the target cells [ion * s^-1].
<prefix>_target_surf_redepos :		The fraction of the sputtered flux that is redeposited on the target cells.
<prefix>_target_surf_Qt :		The reactive gas consumed (positive)or released (negative) by the target cells [sccm].
<prefix>_target_surf_erosionDepth :	Erosion depth (positive) or growth (negative) compared to start of the target cells [nm].
<prefix>_target_surf_erosionSpeed :	Speed of erosion (always positive) without the redeposition contribution [nm * s^-1].
<prefix>_target_surf_surfSpeed :	Speed of surface of the target cells, distinguishing effective erosion (positive) and effective growth (negative) [nm * s^-1]
<prefix>_target_surf_thetaM :		Fraction of non reacted metal of the target cells.
<prefix>_target_surf_thetaR :		Fraction of compound of the target cells.
<prefix>_target_surf_thetaC :		Fraction of chemisorbed metal of the target cells.
<prefix>_target_bulk_n_M :		Subsurface distribution of the non reacted metal concentration relativly to the metal density of the target cells.
<prefix>_target_bulk_n_f :		Subsurface distribution of the non reacted implanted reactive gas concentration relativly to the metal density of the target cells.

 - Substrate
-------------
<prefix>_substrate_depos_<number of substrate>.out :	The fraction of the sputtered flux that is deposited on the substrate cells.
<prefix>_substrate_Qs_<number of substrate>.out :	The reactive gas consumed (always positive) by the substrate cells [sccm].
<prefix>_substrate_thetaS_<number of substrate>.out :	Fraction of compound of the substrate cells.

 Further documentation
=======================
A manual is available within the GUI or on www.draft.ugent.be


the author
Koen Strijckmans
December 2018. 

Contact: 
koen.strijckmans@ugent.be
diederik.depla@ugent.be
