Clean room

Ghent University clean room building. Total floor space >2000m2 of which clean labs 700m2 (class 100 to class 10.000). The clean room is used by the Photonics Research Group, the Centre for Microsystems Technology (CMST) and the Liquid Crystals and Photonics Group. Several master programmes offer courses that include lab sessions in this clean room.

Characterisation of Photonics Integrated Chip fabricated in Ghent University clean room.

High Resolution Scanning Electron Microscope with Focussed Ion Column for inspecting and adapting nanophotonic chips, electronic circuits and novel materials.

Fully automated setup for the optical characterisation of photonic circuits fabricated on large scale wafers (up to 200mm diameter).

Femtosecond laser for locally micro machining transparent materials with high accuracy.